涡旋泵分子泵组合的工作原理?
2022-03-04 10:43

涡旋真空泵的工作腔是由一对型线共轭的涡旋盘副啮合安装组成。涡旋盘就是在盘面开有一个或几个渐开线螺旋槽的涡旋型盘状结构体。一个静涡旋盘与一个动涡旋盘相互交错组装在一起,动、静盘之间由防自转机构保证180°相位差,这样组成的一对涡旋盘副构成了无油涡旋真空泵的抽气机构。

静涡旋盘与动涡旋盘彼此之间在几条直线( 在横截面上是几个点) 上接触形成几对月牙形封闭腔,动涡旋盘在曲轴的驱动下绕静涡旋盘的涡旋体中心运动,接触点沿涡旋曲面移动实现吸气、压缩与排气。

在电机的带动下,曲轴每转一圈,就有一组新的月牙封闭腔形成,从而实现涡旋真空泵的吸气、压缩、排气循环,对被抽气体形成包容和强制输送。

The working chamber of scroll vacuum pump is composed of a pair of scroll disk pairs with conjugate profile. A scroll disk is a scroll disk-shaped structure with one or several involute spiral grooves on the disk surface. A static scroll disk and a moving scroll disk are staggered and assembled together, and the 180 ° phase difference between the moving and static disks is guaranteed by the anti rotation mechanism. A pair of scroll disk pairs formed in this way constitute the air extraction mechanism of the oil-free scroll vacuum pump.

The static scroll disk and the moving scroll disk contact each other on several straight lines (several points on the cross section) to form several pairs of crescent shaped closed cavities. The moving scroll disk moves around the center of the vortex body of the static scroll disk driven by the crankshaft, and the contact point moves along the vortex surface to realize suction, compression and exhaust.

Driven by the motor, a group of new crescent closed cavities are formed every time the crankshaft rotates, so as to realize the suction, compression and exhaust cycle of the scroll vacuum pump, and contain and forcibly transport the extracted gas.

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